Spdt, dpdt transfer, sp4t, sp6t, sp8t, and sp10t mechanical and solid state rf switches for 50ohm and 75ohm systems spanning dc to 40 ghz. What you need to know structure and usage of omron mems switch 2smes01. Analog devices rfmems switches offer excellent reliability with superior precision and rf performance from 0 hz dc to 14 ghz. Mems switches and other components have been very interesting area for research and development in the last few years 16, 917. These switches are the unambiguous micro mechanical switches that are intended to operate at rf to mm wave frequencies, which mean 0.
Abstract radio frequency rf microelectromechanical systems mems have been pursued for more than a decade as a solution of highperformance onchip fixed, tunable and reconfigurable circuits. A capacitive rf mems shunt switch shinji kobayashi, hiroshi kawai murata manufacturing co. Rf mems switches integrated with sealed suspended coplanar. They require only a lowvoltage, lowcurrent power supply and have a fully independent parallel logic control interface. Rf mems provides a class of new devices and components which display superior highfrequency performance relative to conventional usually semiconductor. Enable mechanical onoff switching with mems technology. This unified treatment of rf memsbased circuit technology opens up a new world of solutions for meeting the unique challenges of low powerportable wireless products. Mems switches usages some mechanical movement to achieve a closed or open circuit in the radio frequency transmission lines. Pdf rfmems switches for reconfigurable integrated circuits.
Adi offers a wide range of high performance rf switches that are ideal for instrumentation, communications, military and aerospace applications. Mechanical systems are switches and variable capacitors, which are used in the front. In conclusion, rf mems components such as switches and variable capacitors as well as basic switching units, like for instance spdts single pole double throws have seen the most success in the marketplace. Rf mems switches, and rf mems router circuits produced in the name project. In this chapter, electrostatically actuated rfmems switch configurations that can be easily integrated in uniplanar circuits are. Mems switches and to describe the packaging method and evaluate performance. Rf mems switches are the specific micromechanical switches that are designed to operate at rf to mmwave frequencies. Rf mems switches and integrated switching circuits 2007. The book features exercises and detailed case studies on working rf mems circuits that help you decide what approaches best fit your design constraints.
Aibin yu here, the author builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on rf mems switches and micromachined switching. Mems concepts have been successfully applied in the development of rf switches to be used in the phase shifters which are having the benefits of low loss, low parasitic and high linearity 10. Radio frequency microelectromechanical system rfmems switches have demonstrated superior electrical performance lower loss and higher isolation compared to semiconductorbased devices to implement reconfigurable microwave and millimeter mmwave circuits. Nguyen darpamto 3701 north farifax drive, arlington, virginia 222031714. An integrated driver chip generates a high voltage to electrostatically actuate a switch that can be controlled by a parallel interface and a serial peripheral interface spi. Rf mems switches and integrated switching circuits. Rfmems switches for reconfigurable integrated circuits abstract. Paper tc291 ann model of rf mems lateral spdt switches. Usb, ethernet, and spi control interfaces available. Rf mems switches and integrated switching circuits mems. Ultra low actuation voltage rf mems switch micro and. Fig 1 an rf mems series switch the capacitive switches primarily work by forming a low. Traditionally, gaas mesfets and pin diodes are integrated in the spdt switching circuits.
Rf mems switches and integrated switching circuits mems reference shelf 5. Adi mems switch technology, a revolutionary switching solution evolution to service rf instrumentation and test system needs, targeting relay replacement. Manufactured in gaas and silicon soi processes, rf switches feature higher power handling, better linearity and wider frequency band of operation compared to their cmos counterparts. Wagner fraunhofer institute for silicon technology isit, fraunhoferstr.
Rf circuits for aesa using rf mems switches examples phase shifter. A low loss rf mems kuband integrated switched filter bank, ieee microwave and. Highfrequency performance and hotswitching reliability by tai wen jau high frequency design abstract this article describes the sparameter performance of onboard rf mems switches from dc to 4 ghz. Two different rf mems switches have been developed. The major part of this chapter is committed to the comparison of the rf mems switches with state of the art solid state. However, the performance of these semiconductor switches deteriorates with the increase of the frequency2. An overview of rf mems switches free download as powerpoint presentation. A relay thats about the size of a modern cmos device can take anywhere from 1 to 10 nanoseconds to. Besides rf mems technology, iiiv compound semiconductor. The more complex, integrated networks based on rf mems technologies are promising, but still mostly in development mode. Rf mems switches and integrated switching circuits mems reference shelf 5 liu, aiqun on. Ultrareliable mechanical switches capable of extended life up to 10million switch cycles. Despite the advantages in the design of rf mems switches designing a low actuation voltage rf mems switch is still a challenging task. In this paper, we shall be discussing capacitive switches only.
Pdf foundations of mems download full pdf book download. Fundamentals of adis new rf mems switch technology youtube. Based on direction of motion, mems switches can be classified into two main categories. Liu, rf mems switches and integrated switching circuits, mems reference shelf 5, doi 10. Switches and variable capacitors are important building blocks of radio frequency integrated circuits rfics.
Rf mems switches and integrated switching circuits article in journal of semiconductor technology and science 73 september 2007 with 759 reads how we measure reads. They are offered in standard surfacemount space saving lfcsp plastic packages. Rfmems switches for reconfigurable integrated circuits. International journal of microwave and wireless technologies, 2011. The switching is required in many applications at low as well as at high frequency. Rf mems switches and integrated switching circuits builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on rf mems switches and micromachined switching circuits, and presents a unified framework of coverage. Rf mems switching and integrated switching circuits. To overcome this problem, a small size rf mems switch utilizing a moving plate with multiple holes. The resulting relays arent particularly speedy compared to todays transistors. This paper deals with a relatively new area of radiofrequency rf technology based on microelectromechanical systems mems.
Rf mems have in general seen a remarkable growth in the past two decades due to the immense potentials in defense and commercial applications. Rf mems switches and integrated switching circuits a. The purpose of this paper is to present a new class of printed circuit board pcb. This technology enables a small form factor, wide rf bandwidth, highly linear, low insertion loss switch that is operational from 0 hzdc to 14 ghz, making the adgm4 an ideal solution for a wide range of rf and precision equipment switching needs. For those who wish to read more about rf mems technology and applications, the book by gabriel. It has a spst contact configuration, 1a, normally open type. This paper describes an rfmems switch structure and its fabrication process for developing lowloss multiport rf switches that integrate multiple rf mems rf mems switches integrated with sealed suspended coplanar waveguides for reconfigurable rf circuits ieee conference publication. Rf mems basics this chapter provides the basic introduction to rf mems switches. Tang abstract radio frequency rf microelectromechanical systems mems have been pursued for more than a decade as a solution of highperformance onchip fixed, tunable and. Rfmems switches designed for highperformance uniplanar.
A fully integrated high power rf mems switch in package. Mems based rf circuits could have a large impact on handset applications, because of their inherent small size and good electrical performance. Presents rf switches and switching circuit mems devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation discusses rf switch devices in detail, with both system and componentlevel circuit integration using micro and nanofabrication techniques includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics rf. A radiofrequency microelectromechanical system rfmems is a microelectromechanical systems with electronic components comprising moving submillimetersized parts that provide radiofrequency rf functionality. As an example of rf devices, a capacitive mems switch for millimeterwave has been proposed. Mems micro devices, having movable parts, fabricated with processes similar to ic fabrication rf mems mems devices capable of reconfiguring the rf characteristics of a device. This publication can be downloaded free of charge as a pdf file from. Rf mems circuit design for wireless communications. Rf functionality can be implemented using a variety of rf technologies. An impedance matching structure for a rf mems switch having at least one closeable rf contact in an rf line, the impedance matching structure comprising a protuberance in the rf line immediately adjacent the rf contact that forms one element of a capacitor, the other element of which is formed by the switchs ground plane. It also explores the hotswitching reliability of mems switches using different types of input signals.
The top glass part is used for protecting the actuator and hermetic sealing. Rf mems switches and integrated switching circuits ebook. Us20040227583a1 rf mems switch with integrated impedance. Mems is written as micro electro mechanical systems. Analog and mems switches june 24, 2019 by bill schweber part 1 of this faq looked at the venerable electromechanical rf switch still widely used in some applications, where it is the only viable option and use of pin diodes as rf switches. Material selection and parameter characterization for rf mems switches 8 power given their larger contact area 5. In this brief a new low actuation voltage rf mems switch is presented which can be integrated and controlled with available cmos technologies. An overview of rf mems technologies and applications. Radiofrequency microelectromechanical system wikipedia. Solidstate switches with extremely fast switching times. Request pdf rf mems switches and integrated switching circuits radio frequency rf microelectromechanical systems mems have been pursued for more than a decade as a solution of high. Rfmems switches for reconfigurable integrated circuits article pdf available in ieee transactions on microwave theory and techniques 4611. Rf mems switches and integrated switching circuits ai.